Manufacturing method of template and finished template

Patent name: Manufacturing method of the template and the patent application number of the manufactured template. X
Publication number: 1434930
Applicant: A method for the manufacture of a template, preferably used for nanoimprint lithography, of the Swedish Obdukart company, wherein the template comprises a flat plate of a first material and a three-dimensional structure of a second material arranged on the plate, in the method In order to form the structure, the second material is introduced on the plate. According to the invention, the second material is then fixed with the plate of the first material by a heat treatment of at least 150° C. for producing the template. The invention also relates to a template made by this method.


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